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> Lam research 4520 i solenoid interlock bd device
Lam research 4520 i solenoid interlock bd device
Lam Research 4520 i Solenoid Interlock BD Device
* Model Number: 853-013610-111-2-3614 / Barcode: 357159 / Date: 03/97
* Markings on Case: 714 013623 001 Class B D CMP 0597 / 714 013629 011 Class C B CMP 1295 / 714-013619-001 D Class B.C PMP 1197
* Circuit Board 1: Solenoid Interlock BD / 810-17004 / Rev. D / Serial Number: SA9633848
* Wasco Inc Valve - Model Number: SP128-81W2A-X/6688 / Max. PSIG 250 / 1A 115 VAC / Set: 80 PSIG CL INCR
* SMC Air Filter - Model Number: NAF2000 / Max. Press. 150 PSI
* SMC Air Regulator - Model Number: NAR2000/ Set Press. 7~120 PSI
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