Iowa Industrial Moderated Newsgroup For Surplus Equipment > Manufacturing Equipment
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> Needing Repair
> Kla 5105 cd overlay system
Kla 5105 cd overlay system
Two Cassette Stations, Klass 11, Sony Video Graphic Printer, Maximum/Minimum Die Size – 50 mm / 3 mm, 200mm wafer setup.
System appears to be in excellent condition
Long-term Dynamic Repeatability £ 5 um; £ 3 um (resist/resist pattern for stepper analysis)
Throughput ³ 85 wph (5 sites/wafer)
Time per site £ 3 s (single grab, move, acquire, focus, measure)
Measurement accuracy £ 5 um (before calibration)
