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> Upgeaded matrix 105 for plasma asher/stripper/descum
Upgeaded matrix 105 for plasma asher/stripper/descum
Allwin21 has developed a robot control board for the Matrix machines to help in the diagnostics of robot problems. There are LEDs that indicate if the board has received commands and the type of command. It also has LEDs that indicate if a robot limit sensor is active, along with “good†voltage level indicators.
Combined with Allwin21 Corp advanced Robot control technology , Superior Temperature Control Technologyand AW Control Software, upgraded Matrix 105 provides significant advantages over the original systems:
l Single Wafer, Multi-Step Processing
l Closed-Loop Temperature Control
l Accurate, closed-loop pressure control with “butterfly-style†throttle valve and capacitance manometer
l Timed cycles up to 4 hour each
l New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17†LCD Monitor, standard keyboard and mouse.
l Software calibration and easy to be done.
l More functions and I/O hardware “exposed†for easier maintenance and trouble shooting.
l It is easy to edit recipe with GUI and graph display.
l Save all process data on the computer hard disk.
l A/D and D/A precision is 14 to 16 bits.
l Detect in process and with color curve displayed on the screen.
l Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
l Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
l Sensor status detect function.
