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> Accuthermo AW610 (ag associates heatpulse AG610)rtp/rta
Accuthermo AW610 (ag associates heatpulse AG610)rtp/rta
AccuThermo AW610 is a rapid thermal processor ( RTP) which uses Pentium computer as control system and new developed software to achieve higher precisely temperature control, more friendly user interface, easier diagnositc and maintainence compare with old type RTP system.
Allwin21 Corp. has purchased exclusive manufacture license for AG610 RTP system, details please link to our website: http:// /news1.asp
The Advantage of AW610 RTP systems:
* Integrated process control system
* Real time graphics display，
* Real time process data acquisition, display, and analysis,
* Programmed comprehensive calibration and diagnostic functions.
* Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
* Precise time-temperature profiles tailored to suit specific process requirement.
* Fast heating and cooling rates unobtainable in conventional technologies.
* Consistent wafer-to-wafer process cycle repeatability.
* Elimination of external contamination.
* Small footprint and energy efficiency.
* Other heat treatment process
AccuThermo AW610 Rapid Thermal Processor
Comparison with old AG Heatpulse 610 System:
Steady-state Temperature Range
Temperature measuring precision
Temperature control repeatability
New advanced adaptive temperature control
Not easy to edit with non-convenient data input
It is easy to edit recipe with GUI and graph display
Transfer data to server by EtherNet
Turn off the Lamp controller when computer down
Manually calibrated with adjusting variable resistor
Software calibration and easy to be done
Manual calibration with 8 to 12 points only
It is difficulty to do calibration procedure
Software calibration with nearly 500 points
It is easy to do calibration procedure.
More functions and I/O hardware “exposed†for easier maintenance and trouble shooting
No detecting and display in process
Detect in process and with color curve displaying on the screen
Power supply：208V-240V 50/60Hz 100AMP
Cooling water at 2 GPM (7.5LPM), 30-80 PSIG
Cooling N2 or CDA at 10-15 SCFM (283-425 SLPM)
Process Gas (N2, O2 or Formed Gas)：0-10 SLPM
18†W x 20†D x 10†H (46 cm W x 50 cm D x 25 cm H)
Please visit or contact us by phone: (***) 988-5188
AccuTherm® is a registered trademark of Allwin21 Corp.
